The detailed price will be determined based on the parameters provided by the customer.
Product features of ZAT-XY100:
· Nanometer-level positioning accuracy
·High dynamic performance (cut-off frequency greater than 100Hz)
·Cross roller bearing
·Flexible configuration options (XY customizable non-uniform travel)
·Low side height, XY integrated design
· Resolution: 1 nm, Repetitive positioning accuracy: ±150 nm, Positioning accuracy: ±250 nm, Position stability: 3 nm (with linear drive (needs to be purchased separately), in an isolated vibration laboratory environment)
Features of ZFT-XY200 and XY300 products:
· XY integrated design direct-drive platform
·Dual-axis with four motors for drive, featuring excellent dynamic performance
·Cross roller guide rail
·Compact structure, low side height, and small Abbe error
· Available in 200mm * 200mm and 300mm * 300mm dimensions.
· Resolution: 1 nm, Repetitive positioning accuracy: ±100 nm, Positioning accuracy: ±300 nm
·Stability during operation: 3 nm (with the option of ASH feedback and linear amplifier (must be purchased separately))
·Multiple feedback options
Product Specifications:
| Model | ZAT-XY100 | |
| Travel | 100*100mm | |
| Accuracy | ±300nm | |
| Bi-Repeatability | ±150nm | |
| Pitch | 12 arc sec | |
| Yaw | 12 arc sec | |
| Orthogonality | 15 arc sec | |
| Straightness | ±2μm | |
| Flatness | ±2μm | |
| Moving Mass | Upper | 1.7kg |
| Lower | 4.4kg | |
| Stage Mass | 6.1kg | |
| Load Capacity | 12.0kg | |
| Resolution | 1nm | |
| Minimum Incremental step（1） | 5nm | |
| In Position Stability （1） | 3nm | |
| Maximum Speed（2） | 500mm/s | |
| Maximum Acceleration（2） | 1g | |
| Continuous Force | Upper | 19N |
| Lower | 21N | |
| Peak Force | Upper | 133N |
| Lower | 147N | |
| Material | Steel + Nickel Plating | |
| MTBF | 27,000 Hours | |
| Model | ZFT-XY200 | ZFT-XY300 |
| Travel | 200mm*200mm | 300mm*300mm |
| Accuracy | ±0.3μm | ±0.5 μm |
| Bi-Repeatability | ±0.1 μm | ±0.15 μm |
| Pitch | 15 arc sec | 18 arc sec |
| Yaw | 8 arc sec | 10 arc sec |
| Straightness | ±1.5μm | ±2μm |
| Flatness | ±1.5μm | ±2μm |
| Orthogonality (1) | 15 arc sec | 15 arc sec |
| Maximum Speed （2） | 800 mm/s | 800 mm/s |
| Maximum Acceleration （2） | 1.5g | 1.5g |
| Continuous Force | 48.8 N | 163.6 N |
| Peak Force | 340.8 N | 1013.2N |
| Load Capacity | 20 kg | 30 kg |
| Stage Mass(No Motor) | 27.9 kg | 70 kg |
| Resolution （3） | 1nm | |
| Minimum Incremental step（3） | 5nm | |
| In Position Stability （3） | 3nm | |
| Material | Aluminum | |
| MTBF | 27,000 Hours | |
Product size:
We are glad that you can cooperate with us.,As the journey is far away, please be sure to see the parameters or communicate with our sales when selecting the product, Avoid buying wrong products to delay your use..
